Physical and chemical properties
De koper-sink-tin-swavel keramyske doel brûkt hege suverens cupro sulfide (Cu2S), sink sulfide (ZnS), en tin disulfide (SnS2) poeders as grûnstoffen, dy't folslein bal-mûne en unifoarm mingd neffens de fereaske stoichiometryske ferhâlding, en it mingde poeder wurdt yn 'e mal pleatst. Nei't se hjitpresse en sintere binne, wurdt in koper-sink-tin-sulfur (CZTS) quaternair doel makke. De taret CZTS doel hat in unifoarme gearstalling, in relative tichtheid fan mear as 90 prosint, en goede sputtering prestaasjes, en wurdt benammen brûkt foar de tarieding en grutskalige produksje fan hege-effisjinsje en lege kosten CZTS tinne-film sinnesellen.
Eigenskip:
It proses is ienfâldich, de kosten binne leech, it taret doelmateriaal hat unifoarme komposysje en goede kompaktens, en leit in basis foar it tarieden fan de Cu2ZnSnS4 tinne film sinne-sel-absorptionlaach troch magnetron sputtering.
Related Ceramic Sputtering Materialen
Oxide Sputtering Doelen |
Aluminium okside (Al2O3) | Izertetroxide (Fe3O4) | Lanthanum Nickelate (LaNiO3) | Scandium Oxide (Sc2O3) | Aluminium sink okside (AZO) |
Fluor Tin Oxide (FTO) | Lanthanum Ferrite (LaFeO3) | Strontium Titanate (SrTiO3) | Antimony Tin Oxide (ATO) | Gallium okside (Ga2O3) |
Lanthanum Manganate (LaMnO3) | Strontium Ruthenate (SrRuO3) | Bismuth Oxide (Bi2O3) | Gallium sinkokside (GZO) | Magnesiumoxide (MgO) |
Strontium Manganate (SrMnO3) | Bismut Titanate (BiTiO3) | Gadolinium okside (Gd2O3) | Molybdenum okside (MoO3) | Titanium dioxide (TiO2) |
Barium Titanate (BaTiO3) | Hafniumdioxide (HfO2) | Niobium okside (Nb2Ox) | Titanium pentoxide (Ti3O5) | Cerium okside (CeO2) |
Holmium okside (Ho2O3) | Nikkelokside (NiO) | Tantaal okside (Ta2O5) | Chromium okside (Cr2O3) | Indium okside (In2O3) |
Neodymium okside (Nd2O3) | Terbium okside (Tb4O7) | Cobalt Oxide (CoO) | Indium Tin Oxide (ITO) | Lead Oxide (PbO) |
Thulium okside (Tm2O3) | Koperokside (CuO) | Indium sinkokside (IZO) | Sink Tin Oxide (ZTO) | Vanadium Dioxide (VO2) |
Cuprous okside (Cu2O) | Indium Gallium Sink Oxide (IGZO) | Praseodymium okside (Pr6O11) | Vanadiumtrioxide (V2O3) | Erbium okside (Er2O3) |
Lanthanum okside (La2O3) | Silisiummonokside (SiO) | Vanadium pentoxide (V2O5) | Europium okside (Eu2O3) | Lanthanum Strontium Cobalt Oxide (LSCO) |
Silisiumdiokside (SiO2) | Wolfram trioxide (WO3) | Izertrioxide (Fe2O3) | Lanthaanaluminaat (LaAl2O3) | Samarium okside (Sm2O3) |
Yttrium okside (Y2O3) | Yttrium Zirconium Oxide (YSZ) | Yttrium Barium Koper Oxide (YBCO) | Sinkokside (ZnO) | Zirkoniumokside (ZrO2) |
Fluoride Sputtering Doelen |
Aluminiumfluoride (AlF3) | Dysprosium Fluoride (DyF3) | Neodymiumfluoride (NdF3) | Praseodymiumfluoride (PrF3) | Yttrium Fluoride(YF3) |
Bariumfluoride (BaF2) | Lithiumfluoride (LiF) | Natriumfluoride (NaF) | Strontiumfluoride (SrF3) | Sinkfluoride (ZnF3) |
Calcium Fluoride (CaF2) | Lanthanum Fluoride (LaF3) | Natriumaluminiumfluoride (Na2AlF6) | Samariumfluoride (SmF3) | Ytterbium Fluoride (YbF3) |
Ceriumfluoride (CeF3) | Magnesiumfluoride (MgF2) | Kaliumfluoride (KF) | | |
Nitride Sputtering Doelen |
Aluminium Nitride (AlN) | Hafnium Nitride (HfN) | Silisiumnitrid (Si3N4) | Titanium Nitride (TiN) | Zirkoniumnitrid (ZrN) |
Boron Nitride (BN) | Niobium Nitride (NbN) | Tantalum Nitride (TaN) | Vanadium Nitride (VN) | |
Carbide Sputtering Targets |
Boron Carbide (B4C) | Niobiumkarbid (NbC) | Tantaalkarbid (TaC) | Wolframkarbid (WC) | Zirkoniumkarbid (ZrC) |
Hafniumkarbid (HfC) | Nikkelkarbid (NiC) | Titaniumkarbid (TiC) | Tungsten Carbide Cobalt (WC+Co) | Vanadiumkarbid (VC) |
Molybdeenkarbid (MoC) | Silisiumkarbid (SiC) | Titanium Carbonitrid (TiCN) | | |
Boride Sputtering Doelen |
Chromiumdiboride (CrB2) | Iron Boride (FeB) | Tantalum Boride (TaB) | Titanium Diboride (TiB2) | Hafnium Diboride (HfB2) |
Lanthanum Hexaboride (LaB6) | Zirkoniumdiboride (ZrB2) | | | |
Sulfide Sputtering Doelen |
Cadmium Sulfide (CdS) | Iron Sulfide (FeS) | Mangaansulfide (MnS) | Tantaal Sulfide (TaS) | Magnesium Sulfide (MgS) |
Kopersulfide (CuS) | Lead Sulfide (PbS) | Niobium Sulfide (NbS) | Wolfram Sulfide (WS2) | Antimoansulfide (Sb2S3) |
Cerium Sulfide (Ce2S3) | Molybdeen Sulfide (MoS2) | Yndium Sulfide (In2S3) | Sinksulfide (ZnS) | |
Silicide Sputtering Doelen |
Chromium silicide (CrSi) | Magnesium silicide (MgSi) | Tantaal silicide (TaSi2) | Wolfram silicide (WSi2) | Zirkonium silicide (ZrSi2) |
Molybdenum silicide (MoSi2) | Nikkel Silicide (NiSi) | Titanium silicide (TiSi2) | Vanadium silicide (VSi) | |
Selenide Sputtering Doelen |
Bismut Selenide (Bi2Se3) | Chromium Selenide (CrSe) | Molybdenum Selenide (MoSe2) | Gallium Selenide (Ga2Se3) | Wolfram Selenide (WSe2) |
Koper Selenide (Cu2Se) | Lead Selenide (PbSe) | Indium Selenide (In2Se3) | Germanium Selenide (GeSe2) | Tin Selenide (SnSe) |
Cadmium Selenide (CdSe) | Antimoan Selenide (Sb2Se3) | | | |
Telluride Sputtering Doelen |
Cadmium Telluride (CdTe) | Lead Telluride (PbTe) | Germanium Telluride (GeTe) | Germanium Antimony Telluride (GST) | Bismuth Telluride (Bi2Te3) |
Antimoan tritelluride (Sb2Te3) | Antimoan tritelluride (Sb7Te3) | | | |
Antimonide Sputtering Doelen |
Aluminium Antimonide (AlSb) | Indium Antimonide (InSb) | Gallium Antimonide (GaSb) | Sink Antimonide (ZnSb) | Aluminium Gallium Antimonide (AlGaSb) |
Compound Sputtering Targets Foar Ferroelectric / Lithium Batterijen |
Lithium Cobalt Oxide LiCoO2 | Lithium Mangaan Nikkel Oxide LiNi0.5Mn1.5O3 | Lithium Iron Fosfaat LiFePO4 | Lithium-Rich Lithium Kobalt OxideLi(1+X)CoO2 | Lithium-ryk lithium manganateLi(1+X)Mn2O4 |
Lithium TitanateLi4Ti5O12 | Aluminium Doped Lithium Cobalt Oxide AlLiCoO2 | Aluminium Doped Lithium Manganate LiMn2O4 + Alx | Lithium Titanium FosfaatLiTi2(PO4)3 | Lithium Manganate LiMn2O4 |
Lithiumfosfaat Li3PO4 | Lithium Silisium Fosfaat LiSiPO4 | Barium TitanateBaTiO3 | Strontium TitanateSrTiO3 | Bismut TitanateBiTiO3 |
Lanthanum Strontium Cobalt Oxide LSCO | Lanthanum Calcium Mangaan Oxide LCMO | Lithium Cobalt Oxide LiCo2O4 | Lead Zirconate TitanatePZT | Boronoxide Doped Lithium Fosfaat Li3PO4: B2O3 |
Lithium Lanthaan Titanate Li0.35La0.57TiO3 | Lanthanum Zirconium Lithium Oxide LLZO | Lanthanum Strontium Manganese Oxide LSMO | Bismuth FerriteBiFeO3 | Barium Strontium Titanate BaSrTiO3 |